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About 1,3,5,7-Tetramethylcyclotetrasiloxane


    1,3,5,7-tetramethylcyclotetrasiloxane; TMCTS; methylhydrogen tetramer
    ΔHcomb: 5,308 kJ/mole
    ΔHvap: 177.9 kJ/mole
    Vapor pressure, 20°C: 7.0 mm
    Critical temperature: 278°C
    High molecular weight silane reducing agent
    In the presence of oxygen plasma, produce SiO2 film for microelectronics
    Hydrosilylation of cyclic monomer
    Forms hybrid inorganic-organic polymer suitable for circuit board resin with diene
    Forming gate dielectric by CVD

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